Spectrum has developed a continuous process monitor (WaveRunIR-CPM) that is uniquely designed for real-time semiconductor tools and process chamber in-line monitoring and optimization.
Specifically, this device monitors abatement catalysts that are part of tools in high volume manufacturing that provide real-time end-of-life catalyst results to the tool operators and EHS staff.
Finally, Spectrum has designed a multi-point (up to 16 different sources) FTIR cabinet that can be used for ambient air monitoring in areas of concern for worker exposure or for monitoring specific exhaust mains/laterals to identify uncontrolled releases or point-of-use abatement divide malfunctions.
Spectrum provides consultancy support to aid semiconductor engineers/scientists involved with EHS, safety, abatement devices/systems, facility exhausts, pumps/chillers, TRI reporting, and emissions calculations.
Spectrum also remains in touch with recent potential emission concerns through our relationships with EPA, Semiconductor Industry Association, as well as local and national conferences. By doing so, Spectrum has started addressing EHS and safety concerns within the industry prior to their regulatory requirement(s) (e.g. PFAS, exotic chemistries, new organometallic processes, etc.)
Spectrum’s monitoring team has performed measurements associated with nearly every piece of the semiconductor process:
Simply put, if it is produced in the chip fabrication process, we have collected or measured it. Spectrum specializes in gas-phase measurements and FTIR-based monitoring. Specifically, Spectrum excels in:
